The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2017

Filed:

Jul. 28, 2016
Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Hsin-Yu Chen, Nantou County, TW;

Sheng-Hao Lin, Hsinchu County, TW;

Huai-Tzu Chiang, Tainan, TW;

Hao-Ming Lee, Taichung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 21/02 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); H01L 21/324 (2006.01); H01L 21/306 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0673 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); H01L 21/0217 (2013.01); H01L 21/0262 (2013.01); H01L 21/02164 (2013.01); H01L 21/02488 (2013.01); H01L 21/02532 (2013.01); H01L 21/02603 (2013.01); H01L 21/02636 (2013.01); H01L 21/02639 (2013.01); H01L 21/02664 (2013.01); H01L 21/30604 (2013.01); H01L 21/3247 (2013.01); H01L 29/0669 (2013.01); H01L 29/1033 (2013.01);
Abstract

The present invention provides some methods for forming at least two different nanowire structures with different diameters on one substrate. Since the diameter of the nanowire structure will influence the threshold voltage (Vt) and the drive currents of a nanowire field effect transistor, in this invention, at least two nanowire structures with different diameters can be formed on one substrate. Therefore, in the following steps, these nanowire structures can be applied in different nanowire field effect transistors with different Vt and drive currents. This way, the flexibility of the nanowire field effect transistors can be improved.


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