The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Mar. 14, 2011
Applicants:
Johannes Onvlee, 's-Hertogenbosch, NL;
Robert-han Munnig Schmidt, Hapert, NL;
Inventors:
Johannes Onvlee, 's-Hertogenbosch, NL;
Robert-Han Munnig Schmidt, Hapert, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/52 (2006.01); G03F 7/20 (2006.01); B65H 23/24 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70258 (2013.01); B65H 23/245 (2013.01); G03F 7/707 (2013.01); G03F 7/70275 (2013.01); G03F 7/70283 (2013.01); G03F 7/70391 (2013.01); G03F 7/70525 (2013.01); G03F 7/70583 (2013.01); G03F 7/70775 (2013.01); G03F 7/70816 (2013.01); B65H 2406/311 (2013.01);
Abstract
A substrate handling apparatus for handling a substrate is disclosed. The substrate handling apparatus includes a substrate feeding device to feed the substrate towards an exposure area, a substrate receiving device to receive the substrate from the exposure area, and a substrate stabilization device to maintain, at least in the exposure area, the substrate substantially flat at an exposure height and/or tilt, the substrate stabilization device configured for contactless stabilization of the flexible substrate.