The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Sep. 28, 2015
Applicant:

Globalfoundries Inc., Grand Caymay, KY;

Inventors:

Ruilong Xie, Schenectady, NY (US);

Andre Labonte, Mechanicville, NY (US);

Andreas Knorr, Saratoga Springs, TX (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/78 (2006.01); H01L 29/423 (2006.01); H01L 29/45 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7845 (2013.01); H01L 29/42356 (2013.01); H01L 29/45 (2013.01); H01L 29/6656 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01);
Abstract

A three-dimensional transistor includes a semiconductor substrate, a fin coupled to the substrate, the fin including an active region across a top portion thereof, the active region including a source, a drain and a channel region therebetween. The transistor further includes a gate situated above the channel region, and a gate contact situated in the active region, no portion thereof being electrically coupled to the source or drain. The transistor is achieved by removing a portion of the source/drain contact situated beneath the gate contact during fabrication.


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