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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9691771 B1

PDFFull Text
Expired
Date of Patent:
Jun. 27, 2017

Filed:

Apr. 15, 2016

Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films

Applicant:

L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;

Inventors:

Clément Lansalot-Matras, Princeton, NJ (US);

Wontae Noh, Seoul, KR;

Assignee:

L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Paris, FR;

Attorney:

Patricia E. McQueeney

Primary Examiner:

Joseph Miller, Jr

Int. Cl.
CPC ...
C07F 9/00 (2006.01); H01L 27/108 (2006.01); H01L 21/285 (2006.01); H01L 49/02 (2006.01); C23C 16/18 (2006.01); C23C 16/32 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/42 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01); H01G 13/00 (2013.01); H01G 4/10 (2006.01); H01G 4/20 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1085 (2013.01); C23C 16/18 (2013.01); C23C 16/32 (2013.01); C23C 16/34 (2013.01); C23C 16/405 (2013.01); C23C 16/42 (2013.01); C23C 16/45525 (2013.01); C23C 16/45553 (2013.01); C23C 16/50 (2013.01); H01G 4/10 (2013.01); H01G 4/20 (2013.01); H01G 13/003 (2013.01); H01L 21/28556 (2013.01); H01L 21/28568 (2013.01); H01L 27/10805 (2013.01); H01L 28/60 (2013.01);
Abstract

Vanadium-containing film forming compositions are disclosed, along with methods of synthesizing the same, and methods of forming Vanadium-containing films on one or more substrates via vapor deposition processes using the Vanadium-containing film forming compositions.

Published as:
US2016307905A1; US2016307708A1; US2016307904A1; KR20160124028A; US9691771B2;

Find Patent Forward Citations

Lansalot-Matras, Clément. (2017). Vanadium-containing film forming compositions and vapor deposition of vanadium-containing films (U.S. Patent No. 9691771). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9691771

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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