The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2017

Filed:

Mar. 07, 2012
Applicants:

Richard Kenneth Oxland, Leuven, BE;

Mark Van Dal, Heverlee, BE;

Inventors:

Richard Kenneth Oxland, Leuven, BE;

Mark van Dal, Heverlee, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/786 (2006.01); H01L 29/24 (2006.01); H01L 21/84 (2006.01); H01L 27/12 (2006.01); H01L 29/45 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78681 (2013.01); H01L 21/84 (2013.01); H01L 27/1203 (2013.01); H01L 29/24 (2013.01); H01L 29/45 (2013.01);
Abstract

A nickelide material with reduced resistivity is provided as source/drain contact surfaces in both NMOS and PMOS technology. The nickelide material layer may be a ternary material such as NiInAs, and may be formed from a binary material previously formed in the source/drain regions. The binary material may be the channel material or it may be an epitaxial layer formed over the channel material. The same ternary nickelide material may be used as the source/drain contact surface in both NMOS and PMOS transistors. Various binary or ternary channel materials may be used for the NMOS transistors and for the PMOS transistors.


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