The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Jul. 09, 2015
Joon-seo Song, Seoul, KR;
Woo-seok Ko, Seoul, KR;
Ji-young Shin, Suwon-si, KR;
Seong-jin Yun, Yongin-si, KR;
Yu-sin Yang, Seoul, KR;
Sang-kil Lee, Yongin-si, KR;
Chung-sam Jun, Suwon-si, KR;
Joon-Seo Song, Seoul, KR;
Woo-seok Ko, Seoul, KR;
Ji-Young Shin, Suwon-si, KR;
Seong-Jin Yun, Yongin-si, KR;
Yu-Sin Yang, Seoul, KR;
Sang-Kil Lee, Yongin-si, KR;
Chung-Sam Jun, Suwon-si, KR;
Samsung Electronics Co., Ltd., Geyonggi-do, KR;
Abstract
Example embodiments relate to an apparatus and method for inspecting a substrate defect. The substrate defect inspecting apparatus includes a substrate, a light source emitting an infrared beam to the substrate, a detector detecting the infrared beam reflected from the substrate, and a defect analyzer receiving first information and second information from the detector and analyzing defects existing in the substrate. According to at least one example embodiment, the second information is acquired during a later process than the first information.