The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2017

Filed:

Aug. 19, 2014
Applicant:

Csmc Technologies Fab1 Co., Ltd., Wuxi New District, CN;

Inventors:

Shuo Zhang, Wuxi New District, CN;

Qiang Rui, Wuxi New District, CN;

Genyi Wang, Wuxi New District, CN;

Xiaoshe Deng, Wuxi New District, CN;

Assignee:

CSMC TECHNOLOGIES FAB1 CO., LTD., Wuxi New District, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/06 (2006.01); H01L 29/66 (2006.01); H01L 29/739 (2006.01); H01L 21/3065 (2006.01); H01L 21/265 (2006.01); H01L 21/304 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0664 (2013.01); H01L 21/26513 (2013.01); H01L 21/304 (2013.01); H01L 21/3065 (2013.01); H01L 29/0638 (2013.01); H01L 29/1095 (2013.01); H01L 29/66333 (2013.01); H01L 29/7395 (2013.01);
Abstract

A manufacturing method for reverse conducting insulated gate bipolar transistor, the manufacturing method is characterized by the use of polysilicon for filling in grooves on the back of a reverse conducting insulated gate bipolar transistor. The parameters of reverse conducting diodes on the back of the reverse conducting insulated gate bipolar transistor can be controlled simply by controlling the doping concentration of the polysilicon accurately, indicating relatively low requirements for process control. The reverse conducting insulated gate bipolar transistor manufacturing method is relatively low in requirements for process control and relatively small in manufacturing difficulty.


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