The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Oct. 28, 2014
Tokyo Electron Limited, Tokyo, JP;
Nippo Precision Co., Ltd., Nirasaki-shi, Yamanashi, JP;
Junichi Hagihara, Nirasaki, JP;
Shigekazu Komatsu, Nirasaki, JP;
Kunihiro Furuya, Nirasaki, JP;
Tadayoshi Hosaka, Nirasaki, JP;
Naoki Muramatsu, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
NIPPO PRECISION CO., LTD, Nirasaki-Shi, Yamanashi, JP;
Abstract
A maintenance carriage of a wafer inspection apparatus can easily unload a test head. A wafer inspection apparatusincludes a cell towerin which cellsare arranged at four levels, and each of the cellsaccommodates a test head. At an outside of the cell tower, a maintenance carriageis arranged. The maintenance carriageincludes a carriage baseconfigured to be moved through rollers; a test head caseconfigured to accommodate the test head; a lift deviceprovided uprightly from the carriage baseand configured to move up and down the test head case; and a horizontal position adjusting stageprovided between a lifterof the lift deviceand the test head caseand configured to move the test head casehorizontally with respect to the lifter