The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2017

Filed:

Sep. 26, 2012
Applicants:

Fujimi Incorporated, Kiyosu-shi, Aichi, JP;

Tokyo Electron Limited, Minato-ku, Tokyo, JP;

Inventors:

Hiroaki Mizuno, Kiyosu, JP;

Junya Kitamura, Kiyosu, JP;

Yoshiyuki Kobayashi, Miyagi-ken, JP;

Assignees:

FUJIMI INCORPORATED, Kiyosu-Shi, JP;

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 4/10 (2016.01); C04B 35/495 (2006.01); C04B 35/49 (2006.01); C04B 35/505 (2006.01); C04B 35/50 (2006.01); C23C 4/11 (2016.01);
U.S. Cl.
CPC ...
C04B 35/49 (2013.01); C04B 35/495 (2013.01); C04B 35/50 (2013.01); C04B 35/505 (2013.01); C23C 4/10 (2013.01); C23C 4/11 (2016.01); C04B 2235/3206 (2013.01); C04B 2235/3208 (2013.01); C04B 2235/3213 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/3232 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3251 (2013.01); C04B 2235/3258 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/34 (2013.01); C04B 2235/3409 (2013.01); C04B 2235/3418 (2013.01); Y10T 428/1266 (2015.01); Y10T 428/12611 (2015.01); Y10T 428/12618 (2015.01); Y10T 428/12729 (2015.01); Y10T 428/12931 (2015.01); Y10T 428/12937 (2015.01); Y10T 428/12944 (2015.01); Y10T 428/12951 (2015.01);
Abstract

A thermal spray powder of the present invention contains a rare earth element and a group 2 element, which belongs to group 2 of the periodic table. The thermal spray powder, which contains a rare earth element and a group 2 element, is formed, for example, from a mixture of a rare earth element compound and a group 2 element compound or from a compound or solid solution containing a rare earth element and a group 2 element. The thermal spray powder may further contain a diluent element that is not a rare earth element or a group 2 element and is not oxygen, which is at least one element selected, for example, from titanium, zirconium, hafnium, vanadium, niobium, tantalum, zinc, boron, aluminum, gallium, silicon, molybdenum, tungsten, manganese, germanium, and phosphorus.


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