The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Sep. 23, 2014
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Hiroyuki Shinozaki, Tokyo, JP;
Kenji Shinkai, Tokyo, JP;
Tadakazu Sone, Tokyo, JP;
Hideo Aizawa, Tokyo, JP;
Hiroshi Aono, Tokyo, JP;
Toshio Yokoyama, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 49/00 (2012.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); H01L 21/6719 (2013.01); Y10T 29/49998 (2015.01);
Abstract
A lifting deviceincludes a lifting mechanismand an adjustment member. The lifting mechanismis provided between at least one of a plurality of units of a substrate processing apparatus and an installation surface of the unit, and adjusts height of the at least one unit with respect to the installation surface. The adjustment memberis provided with an extended sectionextended from the lifting mechanism, and is capable of operating the lifting mechanismthrough the extended section