The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Dec. 09, 2015
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Jung-Hwan Kim, Pyeongtaek-si, KR;

Min-Kook Kim, Goyang-si, KR;

Yu-Sin Yang, Seoul, KR;

Sang-Kil Lee, Yongin-si, KR;

Chung-Sam Jun, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/21 (2006.01); H01J 37/285 (2006.01); H01J 37/31 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); H01J 37/285 (2013.01); H01J 37/31 (2013.01); H01J 2237/2445 (2013.01);
Abstract

A spatial image having 2D spatial information is obtained from a surface of a sample by an image creating method. The surface of the sample is milled to obtain an elemental image having material information from the milled surface. The spatial image and the elemental image are composed to form a 2D spatial/elemental image.


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