The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Jul. 28, 2009
Applicants:

Sunyong Choi, Kyunggi-Do, KR;

Yeonho Pae, Kyunggi-Do, KR;

Ellis Chang, Saratoga, CA (US);

Inventors:

SunYong Choi, Kyunggi-Do, KR;

YeonHo Pae, Kyunggi-Do, KR;

Ellis Chang, Saratoga, CA (US);

Assignee:

KLA-Tencor Corp., Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04N 19/00 (2014.01); G11C 29/56 (2006.01);
U.S. Cl.
CPC ...
G11C 29/56 (2013.01); G11C 29/56008 (2013.01);
Abstract

Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer are provided.


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