The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 2017

Filed:

Nov. 12, 2014
Applicant:

Rigaku Corporation, Akishima-shi, JP;

Inventors:

Kazuhiko Omote, Akiruno, JP;

Keiichi Morikawa, Fuchu, JP;

Yoshinori Ueji, Akishima, JP;

Masahiro Tsuchiya, Tachikawa, JP;

Takeshi Fujimura, Akiruno, JP;

Atsunori Kiku, Hino, JP;

Assignee:

RIGAKU CORPORATION, Akishima-Shi, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2006.01); G01N 23/207 (2006.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G01N 23/207 (2013.01); G01N 23/20 (2013.01); G01N 23/20008 (2013.01); G01N 23/20016 (2013.01); G01N 23/20025 (2013.01); G21K 1/062 (2013.01); G01N 2223/045 (2013.01); G01N 2223/05 (2013.01); G01N 2223/315 (2013.01); G01N 2223/6462 (2013.01); G21K 2201/064 (2013.01);
Abstract

Disclosed is an X-ray topography apparatus including an X-ray source, a multilayer film mirror, a slit, a two-dimensional X-ray detector, and a sample moving device that sequentially moves the sample to a plurality of step positions. The X-ray source is a minute focal spot. The multilayer film mirror forms monochromatic, collimated, high-intensity X-rays. The direction in which the multilayer film mirror collimates the X-rays coincides with the width direction of the slit. The step size by which the sample is moved is smaller than the width of the slit. The combination of the size of the minute focal spot, the width of the slit, and the intensity of the X-rays that exit out of the multilayer film mirror allows the contrast of an X-ray image produced when the detector receives X-rays for a predetermined period of 1 minute or shorter to be high enough for observation of the X-ray image.


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