The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2017
Filed:
Mar. 14, 2014
Rudolph Technologies, Inc., Flanders, NJ (US);
John Thornell, Richardson, TX (US);
Steven Knauber, Richardson, TX (US);
Jatinder Dhaliwal, Plano, TX (US);
Justin Miller, Bloomington, MN (US);
Michael Grant, Minneapolis, MN (US);
Kenneth Durden, Vadnais Heights, MN (US);
Rudolph Technologies, Inc., Wilmington, MA (US);
Abstract
A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.