The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Oct. 13, 2015
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Hiroo Takizawa, Haibara-gun, JP;

Shuji Hirano, Haibara-gun, JP;

Natsumi Yokokawa, Haibara-gun, JP;

Wataru Nihashi, Haibara-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/038 (2006.01); C11D 11/00 (2006.01); H01L 21/027 (2006.01); C08F 220/18 (2006.01); C08F 212/14 (2006.01); C08F 220/26 (2006.01); G03F 7/039 (2006.01); G03F 7/32 (2006.01); C08F 12/22 (2006.01); G03F 7/20 (2006.01); C08F 216/14 (2006.01);
U.S. Cl.
CPC ...
G03F 7/038 (2013.01); C08F 12/22 (2013.01); C08F 212/14 (2013.01); C08F 220/18 (2013.01); C08F 220/26 (2013.01); C11D 11/0047 (2013.01); G03F 7/004 (2013.01); G03F 7/039 (2013.01); G03F 7/20 (2013.01); G03F 7/2004 (2013.01); G03F 7/2037 (2013.01); G03F 7/32 (2013.01); G03F 7/325 (2013.01); H01L 21/0275 (2013.01); C08F 216/14 (2013.01);
Abstract

The pattern forming method includes (1) forming a film using an active light sensitive or radiation sensitive resin composition, (2) exposing the film to active light or radiation, and (3) developing the exposed film using a developer including an organic solvent, in which the active light sensitive or radiation sensitive resin composition contains a resin (A) having a group which generates a polar group by being decomposed due to the action of an acid, the resin (A) has a phenolic hydroxyl group and/or a phenolic hydroxyl group protected with a group leaving due to the action of an acid, and the developer including the organic solvent contains an additive which forms at least one interaction of an ionic bond, a hydrogen bond, a chemical bond, and a dipole interaction, with the polar group.


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