The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2017

Filed:

Jul. 11, 2014
Applicants:

Canon Nanotechnologies, Inc., Austin, TX (US);

Toshiba Corporation, Tokyo, JP;

Inventors:

Edward Brian Fletcher, Austin, TX (US);

Gerard M. Schmid, Albany, NY (US);

Se-Hyuk Im, Austin, TX (US);

Niyaz Khusnatdinov, Round Rock, TX (US);

Yeshwanth Srinivasan, Austin, TX (US);

Weijun Liu, Cedar Park, TX (US);

Frank Y. Xu, Round Rock, TX (US);

Assignee:

Canon Nanotechnologies, Inc., Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 43/02 (2006.01); B29C 43/18 (2006.01); B29K 105/00 (2006.01); B29L 31/00 (2006.01); B05D 3/06 (2006.01); B05D 3/12 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 43/021 (2013.01); B29C 43/18 (2013.01); B05D 3/067 (2013.01); B05D 3/12 (2013.01); B29C 2043/025 (2013.01); B29K 2105/0002 (2013.01); B29K 2105/0058 (2013.01); B29L 2031/7562 (2013.01);
Abstract

Imprint lithography methods that incorporate depositing droplets of polymerizable material in patterns that improve fill time performance when employing directionally-oriented imprint templates. The patterns are based on grid arrays formed of repeating sets of rows of droplets oriented along fast and slow axes, with droplets of each row offset along the slow axis relative to droplets in adjacent rows.


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