The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2017
Filed:
Jul. 02, 2013
Applicant:
Nova Measuring Instruments Ltd., Rehovot, IL;
Inventors:
Assignee:
NOVA MEASURING INSTRUMENTS LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); H01L 21/66 (2006.01); G01N 21/55 (2014.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/55 (2013.01); G01N 21/9501 (2013.01); H01L 22/12 (2013.01); G01N 2021/8825 (2013.01); G01N 2201/12 (2013.01);
Abstract
A method and system are presented for use in inspection of via containing structures. According to this technique, measured data indicative of a spectral response of a via-containing region of a structure under measurements is processed, and, upon identifying a change in at least one parameter of the spectral response with respect to a spectral signature of the via-containing region, output data is generated indicative of a possible defect at an inner surface of the via.