The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Apr. 30, 2010
Hui Chen, Burlingame, CA (US);
Allen L. D'ambra, Burlingame, CA (US);
Sen-hou Ko, Sunnyvale, CA (US);
Yufei Chen, Cupertino, CA (US);
Adrian Blank, Gilroy, CA (US);
Mario D. Silvetti, Morgan Hill, CA (US);
Gerald J. Alonzo, Los Gatos, CA (US);
Lakshmanan Karuppiah, San Jose, CA (US);
Hui Chen, Burlingame, CA (US);
Allen L. D'Ambra, Burlingame, CA (US);
Sen-Hou Ko, Sunnyvale, CA (US);
Yufei Chen, Cupertino, CA (US);
Adrian Blank, Gilroy, CA (US);
Mario D. Silvetti, Morgan Hill, CA (US);
Gerald J. Alonzo, Los Gatos, CA (US);
Lakshmanan Karuppiah, San Jose, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of the present invention relates to an apparatus and method for cleaning a substrate using a disk brush. One embodiment provides a substrate cleaner comprising a substrate chuck disposed in the processing volume, and a brush assembly disposed in the processing volume, wherein the brush assembly comprises a disk brush movably disposed opposing the substrate chuck, and a processing surface of the disk brush contacts a surface of the substrate on the substrate chuck.