The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 09, 2017

Filed:

Dec. 23, 2015
Applicant:

Park Systems Corp., Suwon-si, Gyeonggi-do, KR;

Inventors:

Sang-il Park, Seongnam-si, KR;

Dongryul Kim, Gwangmyeong-si, KR;

Byoung Woon Ahn, Anyang-si, KR;

Sang Han Chung, Seoul, KR;

Assignee:

PARK SYSTEMS CORP., Suwon-Si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
G01Q 20/02 (2013.01); B82Y 35/00 (2013.01);
Abstract

Provided are a head having improved usability by limiting a movement range of a laser spot and an atomic force microscope having the same. A head according to an exemplary embodiment of the present disclosure is a head measuring bending of a cantilever by using a laser beam reflected on the surface of the cantilever in order to acquire information on a sample surface by using a tip of the cantilever. The head includes: a spot moving means configured to move a laser spot so as to position the laser spot on the surface of the cantilever; and a movement limiting means configured to limit a movement range of the laser spot moved by the spot moving means in a predetermined range.


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