The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Dec. 30, 2014
Applicant:

Globalfoundries Singapore Pte. Ltd., Singapore, SG;

Inventors:

Ming Zhu, Singapore, SG;

Yiang Aun Nga, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/70 (2006.01); H01L 21/8234 (2006.01); H01L 29/66 (2006.01); H01L 21/321 (2006.01); H01L 27/088 (2006.01); H01L 21/28 (2006.01); H01L 29/49 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823437 (2013.01); H01L 21/28088 (2013.01); H01L 21/32115 (2013.01); H01L 21/823475 (2013.01); H01L 27/088 (2013.01); H01L 29/66545 (2013.01); H01L 21/823842 (2013.01); H01L 29/4966 (2013.01);
Abstract

Integrated circuits and methods for manufacturing the same are provided. A method for producing an integrated circuit includes forming a first active dummy gate, a second active dummy gate, and an inactive gate overlying a substrate. The first active dummy gate is replaced with a first metal gate, where replacing the first active dummy gate includes planarizing the first metal gate, the second active dummy gate, and the inactive gate. The second active dummy gate is replaced with a second replacement metal after the first active dummy gate was replaced, where the inactive gate remains overlying the substrate.


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