The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
Jun. 28, 2011
Masaaki Nagase, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Yohei Sawada, Osaka, JP;
Tooru Hirai, Osaka, JP;
Kazuyuki Morisaki, Osaka, JP;
Kouji Nishino, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Masaaki Nagase, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Yohei Sawada, Osaka, JP;
Tooru Hirai, Osaka, JP;
Kazuyuki Morisaki, Osaka, JP;
Kouji Nishino, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
FUJIKIN INCORPORATED, Osaka, JP;
Abstract
In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve Vof the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve Vconnected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.