The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
May. 21, 2014
Alex Phillip Graham Robinson, Birmingham, GB;
Richard Edward Palmer, Southbridge, GB;
Andreas Frommhold, Gera, DE;
Dongxu Yang, Birmingham, GB;
Alex Phillip Graham Robinson, Birmingham, GB;
Richard Edward Palmer, Southbridge, GB;
Andreas Frommhold, Gera, DE;
Dongxu Yang, Birmingham, GB;
Irresistible Materials LTD, Chelhydra Walk, Maritime Quarter, Swansea, Wales, GB;
Abstract
The present disclosure relates to novel fullerene derivatives, positive and negative photoresist compositions prepared therefrom and methods of using them. The derivatives, their photoresist compositions and the methods are ideal for high speed, fine pattern processing using, for example, ultraviolet radiation, extreme ultraviolet radiation, beyond extreme ultraviolet radiation, X-rays, electron beam and other charged particle rays.