The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Mar. 12, 2013
Applicant:
Fujimi Incorporated, Kiyosu-shi, Aichi, JP;
Inventors:
Yukinobu Yoshizaki, Kiyosu, JP;
Yoshihiro Izawa, Kiyosu, JP;
Assignee:
FUJIMI INCORPORATED, Kiyosu-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); B24B 37/04 (2012.01); C23F 1/30 (2006.01); C23F 3/06 (2006.01); H01L 21/306 (2006.01); C23F 3/04 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); B24B 37/044 (2013.01); C23F 1/30 (2013.01); C23F 3/04 (2013.01); C23F 3/06 (2013.01); H01L 21/30625 (2013.01); H01L 45/06 (2013.01); H01L 45/144 (2013.01); H01L 45/1683 (2013.01);
Abstract
A polishing composition is used to polish a polishing subject having a phase change alloy. The polishing composition includes abrasive grains and a brittle film formation agent. The brittle film formation agent is at least one or more selected from a saturated monocarboxylic acid and an organophosphorus compound.
Quick Actions:
Yoshizaki, Yukinobu. (2017). Polishing composition (U.S. Patent No. 9631121). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9631121
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile