The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Dec. 17, 2015
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Gregory A. Schwind, Portland, OR (US);
N. William Parker, Hillsboro, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/21 (2006.01); H01J 27/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/21 (2013.01); H01J 27/205 (2013.01); H01J 37/08 (2013.01); H01J 2237/006 (2013.01); H01J 2237/082 (2013.01); H01J 2237/0827 (2013.01); H01J 2237/31749 (2013.01);
Abstract
A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.