The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Feb. 07, 2011
Michel Riepen, Veldhoven, NL;
Erik Henricus Egidius Catharina Eummelen, Eindhoven, NL;
Sandra Van Der Graaf, 's-Hertogenbosch, NL;
Rogier Hendrikus Magdalena Cortie, Ittervoort, NL;
Takeshi Kaneko, 's-Hertogenbosch, NL;
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Laurentius Johannes Adrianus Van Bokhoven, Veldhoven, NL;
Fabrizio Evangelista, Eindhoven, NL;
David Bessems, Eindhoven, NL;
Cornelius Maria Rops, Waalre, NL;
Adrianus Marinus Verdonck, Wouwse Plantage, NL;
Nicolaas Ten Kate, Almkerk, NL;
Michel Riepen, Veldhoven, NL;
Erik Henricus Egidius Catharina Eummelen, Eindhoven, NL;
Sandra Van Der Graaf, 's-Hertogenbosch, NL;
Rogier Hendrikus Magdalena Cortie, Ittervoort, NL;
Takeshi Kaneko, 's-Hertogenbosch, NL;
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Laurentius Johannes Adrianus Van Bokhoven, Veldhoven, NL;
Fabrizio Evangelista, Eindhoven, NL;
David Bessems, Eindhoven, NL;
Cornelius Maria Rops, Waalre, NL;
Adrianus Marinus Verdonck, Wouwse Plantage, NL;
Nicolaas Ten Kate, Almkerk, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A fluid handling structure for a lithographic apparatus, the fluid handling structure successively having, at a boundary from a space configured to comprise immersion fluid to a region external to the fluid handling structure: an extractor having at least one opening arranged in a first line that, in use, is directed towards a substrate and/or a table; and a liquid manipulator on a surface that, in use, faces the substrate and/or table to reduce the chance of droplets on the surface from coalescing.