The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Sep. 22, 2014
Applicant:
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Inventors:
Manabu Shiozawa, Tokyo, JP;
Koichi Watanabe, Tokyo, JP;
Masataka Shirai, Tokyo, JP;
Kentaro Osawa, Tokyo, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/44 (2006.01); G01N 21/65 (2006.01);
U.S. Cl.
CPC ...
G01N 21/65 (2013.01); G01N 2021/653 (2013.01); G01N 2201/0638 (2013.01); G01N 2201/06113 (2013.01);
Abstract
To measure a surface state, reflective CARS is suitable in terms of the signal intensity. However, with the reflective CARS, it has been difficult to identify the surface position because the shape information is not acquired. Thus, a reflective CARS microscope is combined with a high-resolution phase sensor. The surface position is identified with the phase sensor, and reflected CARS generated from the surface is detected, so that composition analysis is performed.