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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9618856 B1

PDFFull Text
Expired
Date of Patent:
Apr. 11, 2017

Filed:

Jun. 24, 2016

Method of overlay in extreme ultra-violet (euv) lithography

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Chia-Ching Huang, Su-ao Township, TW;

Chia-Hao Hsu, Hsinchu, TW;

Chia-Chen Chen, Hsinchu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Attorney:

Eschweiler & Potashnik, LLC

Primary Examiner:

Mesfin Asfaw

Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03F 7/20 (2006.01); H01L 21/683 (2006.01); C23C 16/04 (2006.01); C23C 16/34 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70708 (2013.01); C23C 16/042 (2013.01); C23C 16/34 (2013.01); C23C 16/56 (2013.01); G03F 7/70633 (2013.01); G03F 7/70783 (2013.01); H01L 21/6833 (2013.01); Y10T 29/49155 (2015.01);
Abstract

The present disclosure relates to a deformable reticle chuck. In some embodiments, an extreme ultraviolet (EUV) deformable reticle chuck has a substrate of insulating material with a plurality of protrusions extending outward from a first side of the substrate. A resistive material is arranged along a second side of the substrate below the plurality of protrusions. The resistive material is configured to expand in response to an applied current or voltage to adjust a shape of a reticle.

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Huang, Chia-Ching. (2017). Method of overlay in extreme ultra-violet (euv) lithography (U.S. Patent No. 9618856). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9618856

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