The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Nov. 05, 2010
Yoshiyuki Utsumi, Kawasaki, JP;
Makiko Irie, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Makiko Irie, Kawasaki, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Abstract
A resist composition including a base component that exhibits changed solubility in an alkali developing solution under the action of acid, an acid-generator component that generates acid upon exposure, and a nitrogen-containing organic compound, the acid generator component including an acid generator represented by general formula (b0), the nitrogen-containing organic compound including a compound represented by general formula (d1) or general formula (d2) in which each of Rand Rrepresents an aryl group or an alkyl group, Rf represents a fluorinated alkyl group, Xrepresents a counter anion, each of Rand Rrepresents an aliphatic hydrocarbon group, Rrepresents a hydrocarbon group having 5 or more carbon atoms, and each of Rand Rindependently represents a hydrogen atom, an aliphatic hydrocarbon group, or —C(═O)—O—R.