The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9614086 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 04, 2017

Filed:

Dec. 30, 2015
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu OT, TW;

Inventors:

Yee-Chia Yeo, Hsinchu, TW;

Carlos H. Diaz, Mountain View, CA (US);

Chih-Hao Wang, Hsinchu County, TW;

Ling-Yen Yeh, Hsinchu, TW;

Yuan-Chen Sun, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); H01L 23/535 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7849 (2013.01); H01L 21/30604 (2013.01); H01L 23/535 (2013.01); H01L 29/1054 (2013.01); H01L 29/66545 (2013.01); H01L 29/66553 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01);
Abstract

A semiconductor device includes a fin having a first semiconductor material. The fin includes a source/drain (S/D) region and a channel region. The S/D region provides a top surface and two sidewall surfaces. A width of the S/D region is smaller than a width of the channel region. The semiconductor device further includes a semiconductor film over the S/D region and having a doped second semiconductor material. The semiconductor film provides a top surface and two sidewall surfaces that are substantially parallel to the top and two sidewall surfaces of the S/D region respectively. The semiconductor device further includes a metal contact over the top and two sidewall surfaces of the semiconductor film and operable to electrically communicate with the S/D region.


Find Patent Forward Citations

Yeo, Yee-Chia. (2017). Conformal source and drain contacts for multi-gate field effect transistors (U.S. Patent No. 9614086). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9614086

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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