The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 04, 2017

Filed:

Mar. 13, 2015
Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventors:

Yoshiro Shimojo, Yokkaichi, JP;

Masaru Kito, Kuwana, JP;

Yoshihiro Yanai, Yokkaichi, JP;

Assignee:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 27/11582 (2017.01); H01L 27/11565 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 27/11565 (2013.01);
Abstract

In general, according to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a memory film, a partitioning member, a first interlayer insulating film, and a first plug. The stacked body is provided on the substrate, and including a plurality of electrode films and a plurality of insulating films. The semiconductor pillar is provided in the stacked body. The partitioning member is provided in the stacked body. The first plug is connected to the semiconductor pillar. A central axis of the first plug is shifted from a central axis of the semiconductor pillar so as to approach the nearest partitioning member.


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