The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
Mar. 13, 2015
Applicant:
Jeol Ltd., Tokyo, JP;
Inventor:
Yuji Konyuba, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); C23C 14/14 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); C23C 14/14 (2013.01); H01J 2237/20 (2013.01);
Abstract
A method of fabricating a sample support membrane used to support an electron microscope sample starts with forming a first layer on a first layer of a substrate (S). A second surface of the substrate that faces away from the first surface is etched to form an opening that exposes the first layer (S). A second layer is formed on the first layer (S). The region of the first layer that overlaps the opening as viewed within a plane is removed to expose the second layer (S).