The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
Oct. 02, 2014
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Raghavan Konuru, Andhra Pradesh, IN;
Naema Bhatti, San Jose, CA (US);
Michael Lennek, San Jose, CA (US);
Martin Plihal, Pleasanton, CA (US);
Assignee:
KLA-Tencor Corp., Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2006.01); G06K 9/62 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G06K 9/6254 (2013.01); G06K 9/6282 (2013.01); G06K 2209/19 (2013.01);
Abstract
Methods and systems for setting up a classifier for defects detected on a wafer are provided. One method includes generating a template for a defect classifier for defects detected on a wafer and applying the template to a training data set. The training data set includes information for defects detected on the wafer or another wafer. The method also includes determining one or more parameters for the defect classifier based on results of the applying step.