The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
Aug. 08, 2012
Kunio Miyauchi, Nirasaki, JP;
Kunio Miyauchi, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A particle monitoring method of monitoring particles included in an exhaust gas from a depressurized processing vesselincludes counting the particles included in the exhaust gas from the depressurized processing vesselwhile cleaning an inside of the depressurized processing vesselby a particle monitor; creating a histogram showing a time and the number of particles from a result of the counting of the particles; extracting, from the histogram, a first feature amount indicating a correlation between a mode of the number of the particles and a particle counting period; and extracting, from the histogram, a second feature amount indicating a correlation between the particle counting period and a distribution tendency of the particles during the particle counting period.