The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
Aug. 13, 2015
International Business Machines Corporation, Armonk, NY (US);
James W. Adkisson, Jericho, VT (US);
Yoba Amoah, Fairfax, VT (US);
Jeffrey P. Gambino, Westford, VT (US);
Christine A. Leggett, Colchester, VT (US);
Max L. Lifson, S. Burlington, VT (US);
Charles F. Musante, Burlington, VT (US);
Sruthi Samala, Bangor, ME (US);
David C. Thomas, Richmond, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method including forming a through-substrate via through a thickness of a substrate, the thickness of the substrate is measured from a front side of the substrate to a back side of the substrate, removing a first portion of the substrate to form an opening in the back side of the substrate such that a second portion of the substrate remains in direct contact surrounding a vertical sidewall of the through-substrate via, and filling the opening with an alternate material having a lower modulus of elasticity than the substrate.