The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9601392 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 21, 2017

Filed:

Oct. 30, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Ming Lei, Ballston Lake, NY (US);

Byoung-Gi Min, Cohoes, NY (US);

Xusheng Wu, Ballston Lake, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 27/11 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); H01L 22/30 (2013.01); H01L 27/1104 (2013.01);
Abstract

A method and device for characterizing a DC parameter of a SRAM device based on TDCD are provided. Embodiments include forming a SRAM test device, the SRAM test device having a top edge and a bottom edge and at least a first and a second S/D contact, a gate contact, and a channel region; inducing an inversion charge in the channel region through the gate contact; scanning the first S/D contact with an ebeam subsequent to inducing the inversion charge; and characterizing at least one DC parameter of the SRAM test device based on a dissipation of the inversion charge between the steps of inducing and scanning


Find Patent Forward Citations

Lei, Ming. (2017). Device characterization by time dependent charging dynamics (U.S. Patent No. 9601392). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9601392

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…