The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
Mar. 03, 2016
Applicant:
Hermes Microvision Inc., Hsinchu, TW;
Inventors:
Assignee:
HERMES MICROVISION INC., Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 2237/20292 (2013.01); H01J 2237/2817 (2013.01);
Abstract
Laser sub-divisional error (SDE) effect is compensated by using adaptive tuning. This compensated signal can be applied to position detection of stage in ebeam inspection tool, particularly for continuous moving stage.