The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2017
Filed:
Jun. 12, 2015
Globalfoundries Inc., Grand Cayman, KY;
Wenhui Wang, Clifton Park, NY (US);
Ryan Ryoung-han Kim, Albany, NY (US);
Linus Jang, Clifton Park, NY (US);
Jason Cantone, Mechanicville, NY (US);
Lei Sun, Albany, NY (US);
Seowoo Nam, Gyeonggi-do, KR;
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Process of using a dummy gate as an interconnection and a method of manufacturing the same are disclosed. Embodiments include forming on a semiconductor substrate dummy gate structures at cell boundaries, each dummy gate structure including a set of sidewall spacers and a cap disposed between the sidewall spacers; removing a first sidewall spacer or at least a portion of a first cap on a first side of a first dummy gate structure and forming a first gate contact trench over the first dummy gate structure; and filling the first gate contact trench with a metal to form a first gate contact.