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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9588423 B1

PDFFull Text
Date of Patent:
Mar. 07, 2017

Filed:

Nov. 14, 2014

Acid diffusion control agent, radiation-sensitive resin composition, resist pattern-forming method, compound, and production method

Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Hayato Namai, Tokyo, JP;

Norihiko Ikeda, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Anca Eoff

Int. Cl.
CPC ...
G03F 7/039 (2006.01); C07C 227/08 (2006.01); C07C 229/12 (2006.01); G03F 7/004 (2006.01); C07D 307/94 (2006.01); C07D 215/06 (2006.01); C07H 9/04 (2006.01); C07D 493/10 (2006.01); C07D 211/14 (2006.01); C07D 311/74 (2006.01); C07D 223/10 (2006.01); C07D 405/06 (2006.01); C07D 411/12 (2006.01); C07C 229/08 (2006.01); C07D 493/04 (2006.01); C07D 277/60 (2006.01); C07D 295/15 (2006.01); C07D 307/20 (2006.01); C07D 215/04 (2006.01); C07D 295/108 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 227/08 (2013.01); C07C 229/08 (2013.01); C07C 229/12 (2013.01); C07D 211/14 (2013.01); C07D 215/04 (2013.01); C07D 215/06 (2013.01); C07D 223/10 (2013.01); C07D 277/60 (2013.01); C07D 295/108 (2013.01); C07D 295/15 (2013.01); C07D 307/20 (2013.01); C07D 307/94 (2013.01); C07D 311/74 (2013.01); C07D 405/06 (2013.01); C07D 411/12 (2013.01); C07D 493/04 (2013.01); C07D 493/10 (2013.01); C07H 9/04 (2013.01); G03F 7/0397 (2013.01); C07C 2103/74 (2013.01);
Abstract

An acid diffusion control agent includes a compound represented by a formula (1), a compound represented by a formula (2) or both thereof. Rrepresents a hydrocarbon group comprising a monovalent alicyclic structure, or the like. Rand Reach independently represent a monovalent hydrocarbon group, or the like. Rand Reach independently represent a monovalent hydrocarbon group, or the like. Rand Reach independently represent a monovalent hydrocarbon group, or the like. Rrepresents a monocyclic heterocyclic group together with the ester group and with the carbon atom. n is an integer of 1 to 6. Rrepresents a monovalent hydrocarbon group, or the like. Rrepresents a monovalent hydrocarbon group having 1 to 10 carbon atoms. Rand Reach independently represent a monovalent hydrocarbon group, or the like. Rand Reach independently represent a monovalent hydrocarbon group, or the like.

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