The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
Aug. 11, 2014
Applied Materials Israel, Ltd., Rehovot, IL;
Michael R. Rice, Pleasanton, CA (US);
Natan Schlimoff, Rehovot, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Israel Avneri, Ramat-Gan, IL;
Yoram Uziel, Post Misgav, IL;
Erez Admoni, Petach-Tikva, IL;
Paul Reuter, Austin, TX (US);
William (Ty) Weaver, Austin, TX (US);
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
There is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.