The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
Jun. 05, 2014
Applicant:
Dnf Co., Ltd., Daejeon, KR;
Inventors:
Se Jin Jang, Daegu, KR;
Sang-Do Lee, Daejeon, KR;
Sung Gi Kim, Daejeon, KR;
Byeong-il Yang, Daejeon, KR;
Jang Hyeon Seok, Daejeon, KR;
Sang Ick Lee, Daejeon, KR;
Myong Woon Kim, Daejeon, KR;
Assignee:
DNF CO., LTD., Daejeon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F 7/02 (2006.01); C07F 7/10 (2006.01);
U.S. Cl.
CPC ...
C07F 7/10 (2013.01);
Abstract
Provided are a novel amino-silyl amine compound, a method for preparing the same, and a silicon-containing thin-film using the same, wherein the amino-silyl amine compound has thermal stability and high volatility and is maintained in a liquid state at room temperature and under a pressure where handling is easy to thereby form a silicon-containing thin-film having high purity and excellent physical and electrical properties by various deposition methods.