The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Nov. 14, 2013
Applicant:
AZ Electronic Materials (Luxembourg) S.a.r.l., Luxembourg, LU;
Inventors:
Toshiaki Nonaka, Shizuoka, JP;
Daishi Tokoyama, Shizuoka, JP;
Takashi Fuke, Shizuoka, JP;
Yuji Tashiro, Shizuoka, JP;
Assignee:
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L., Luxembourg, LU;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 183/04 (2006.01); C08J 5/18 (2006.01); G03F 7/023 (2006.01); G03F 7/075 (2006.01);
U.S. Cl.
CPC ...
C08J 5/18 (2013.01); C09D 183/04 (2013.01); G03F 7/0233 (2013.01); G03F 7/0757 (2013.01); C08J 2383/06 (2013.01);
Abstract
A positive-type photosensitive siloxane composition which comprises (I) two or more polysiloxanes that differ in the rate of dissolution in aqueous tetramethylammonium hydroxide (TMAH) solutions, (II) a polysiloxane that gives a film which after prebaking has a rate of dissolution in 2.38 wt-% aqueous TMAH solution of 50-1,000 Å/sec and that has a group soluble in aqueous TMAH solution, other than silanol, (III) a diazonaphthoquinone derivative, and (IV) a solvent.