The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2017

Filed:

Jun. 20, 2014
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Lee-Wee Teo, Singapore, SG;

Ming Zhu, Singapore, SG;

Hui-Wen Lin, Taiping, TW;

Bao-Ru Young, Zhubei, TW;

Harry-Hak-Lay Chuang, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 27/088 (2006.01); H01L 29/40 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 29/401 (2013.01); H01L 21/823425 (2013.01); H01L 21/823468 (2013.01); H01L 21/823814 (2013.01); H01L 21/823864 (2013.01); H01L 27/088 (2013.01);
Abstract

A method of fabricating a semiconductor device includes forming a first set of gate electrodes over a substrate, adjacent gate electrodes of the first set of gate electrodes being separated by a first gap width. Each gate electrode of the first set of gate electrodes has a first gate width. The method further includes forming a second set of gate electrodes over the substrate, adjacent gate electrodes of the second set of gate electrodes being separated by a second gap width less than the first gap width. Each gate electrode of the second set of gate electrodes has a second gate width greater than the first gate width.


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