The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2017

Filed:

May. 28, 2015
Applicant:

Advanced Semiconductor Engineering, Inc., Kaohsiung, TW;

Inventors:

Teck-Chong Lee, Kaohsiung, TW;

Chien-Hua Chen, Kaohsiung, TW;

Yung-Shun Chang, Kaohsiung, TW;

Pao-Nan Lee, Kaohsiung, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/08 (2006.01); H01L 49/02 (2006.01); H01L 27/01 (2006.01); H01L 21/768 (2006.01); H01L 21/48 (2006.01); H05K 1/03 (2006.01); H05K 1/18 (2006.01); H01L 23/498 (2006.01);
U.S. Cl.
CPC ...
H01L 28/60 (2013.01); H01L 21/486 (2013.01); H01L 21/4857 (2013.01); H01L 21/76898 (2013.01); H01L 23/49822 (2013.01); H01L 27/016 (2013.01); H01L 28/10 (2013.01); H01L 23/49816 (2013.01); H01L 2224/4813 (2013.01); H05K 1/0306 (2013.01); H05K 1/185 (2013.01); H05K 2201/0154 (2013.01);
Abstract

A semiconductor device includes a substrate, a seed layer, a first patterned metal layer, a dielectric layer and a second metal layer. The seed layer is disposed on a surface of the substrate. The first patterned metal layer is disposed on the seed layer and has a first thickness. The first patterned metal layer includes a first part and a second part. The dielectric layer is disposed on the first part of the first patterned metal layer. The second metal layer is disposed on the dielectric layer and has a second thickness, where the first thickness is greater than the second thickness. The first part of the first patterned metal layer, the dielectric layer and the second metal layer form a capacitor. The first part of the first patterned metal layer is a lower electrode of the capacitor, and the second part of the first patterned metal layer is an inductor.


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