The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Mar. 18, 2013
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Rolf Freimann, Aalen, DE;
Norman Baer, Aalen, DE;
Guido Limbach, Aalen, DE;
Thure Boehm, Aalen, DE;
Gero Wittich, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A mirror (') with a substrate (S) and a layer arrangement configured such that light () having a wavelength below 250 nm and incident on the mirror at at least an angle of incidence of between 0° and 30° is reflected with more than 20% of its intensity. The layer arrangement has at least one surface layer system (P′″) having a periodic sequence of at least two periods (P) of individual layers, wherein the periods (P) include a high refractive index layer (H′″) and a low refractive index layer (L′″). The layer arrangement has at least one graphene layer. Use of graphene (G, SPL, B) on optical elements reduces surface roughness to below 0.1 nm rms HSFR and/or protects the EUV element against a radiation-induced volume change of more than 1%. Graphene is also employed as a barrier layer to prevent layer interdiffusion.