The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
May. 16, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Hans-Juergen Mann, Oberkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 13/08 (2006.01); G02B 17/06 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70058 (2013.01); G02B 13/08 (2013.01); G02B 17/0663 (2013.01); G03F 7/702 (2013.01); G03F 7/70216 (2013.01); G03F 7/70233 (2013.01);
Abstract
An imaging optical system for a projection exposure system has at least one anamorphically imaging optical element. This allows a complete illumination of an image field in a first direction with a large object-side numerical aperture in this direction, without the extent of the reticle to be imaged having to be enlarged and without a reduction in the throughput of the projection exposure system occurring.