The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 14, 2017

Filed:

Mar. 04, 2013
Applicant:

Advantest Corporation, Tokyo, JP;

Inventors:

Tomoyu Yamashita, Miyagi, JP;

Akiyoshi Irisawa, Miyagi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 17/00 (2006.01); G01N 21/55 (2014.01); G01N 21/3581 (2014.01);
U.S. Cl.
CPC ...
G01N 21/55 (2013.01); G01N 21/3581 (2013.01);
Abstract

Provided is a light beam incident device including an off-axis parabolic mirror that receives parallel light beams and converges the parallel light beams at one point on an object to be measured, and an incident-side light reception surface of a mirror that feeds the parallel light beams to the off-axis parabolic mirror. An angle (incident angle) between the object to be measured and converged light beams obtained by converging the parallel light beams changes in accordance with a light reception portion at which the off-axis parabolic mirror receives the parallel light beams. The incident side light reception surface of the mirror can change the light reception portion by moving with respect to the off-axis parabolic mirror.


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