The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2017
Filed:
Oct. 29, 2013
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A sample storage container of the present invention includes: a storage container () that stores a sample () under an atmosphere different from an atmosphere of an outside; a diaphragm () through which a charged particle beam passes through or transmits; a sample stage () that is arranged inside the storage container () and that is capable of moving a relative position of the sample () to the diaphragm () in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section () that moves the sample stage () from an outside of the storage container (), wherein the sample storage container is set in a state where the sample () is stored in a vacuum chamber of a charged particle beam apparatus.