The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2017
Filed:
Jul. 02, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Loke Yuen Wong, Singapore, SG;
Ke Chang, Singapore, SG;
Yueh Sheng Ow, Singapore, SG;
Ananthkrishna Jupudi, Milpitas, CA (US);
Glen T. Mori, Gilroy, CA (US);
Aksel Kitowski, Singapore, SG;
Arkajit Roy Barman, Singapore, SG;
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/02 (2006.01); H01L 21/3105 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02345 (2013.01); H01L 21/0234 (2013.01); H01L 21/02118 (2013.01); H01L 21/31058 (2013.01); H01L 21/67115 (2013.01);
Abstract
Methods and apparatus for processing a substrate are described herein. A vacuum multi-chamber deposition tool can include a degas chamber with both a heating mechanism and a variable frequency microwave source. The methods described herein use variable frequency microwave radiation to increased quality and speed of the degas process without damaging the various components.