The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2017
Filed:
Nov. 02, 2011
Yusuke Ominami, Hitachinaka, JP;
Sukehiro Ito, Hitachinaka, JP;
Masami Katsuyama, Hitachinaka, JP;
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Abstract
Provided is a charged particle beam device or charged particle microscope permitting observation of even a large-sized specimen in the air atmosphere or a gaseous atmosphere. A charged particle beam device that adopts a thin film which partitions a vacuum atmosphere and the air atmosphere (or gaseous atmosphere) includes a charged particle optical lens barrel in which a charged particle optical system is stored, a housing in which a route along which a primary charged particle beam emitted from the charged particle optical lens barrel reaches the thin film is sustained in the vacuum atmosphere, and a mechanism that bears the charged particle optical lens barrel and first housing against a device installation surface. As the bearing mechanism, a housing having an opening through which a large-sized specimen is carried in or a mechanism having a shape other than the shape of the housing, such as, a post is adopted.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile