The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Feb. 03, 2016
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Hau-Yan Lu, Hsinchu, TW;
Chun-Yao Ko, Hsinchu, TW;
Chun-Heng Liao, Taipei County, TW;
Felix Ying-Kit Tsui, Cupertino, CA (US);
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Abstract
A memory device is disclosed. The memory device includes a substrate, including a substrate, including a source region and a drain region; and a gate stack, formed over a surface of the substrate, wherein the gate stack includes: a tunneling layer; a first layer; a second layer; a third layer; and a blocking layer; wherein each of the tunneling layer and the blocking layer has an oxygen proportion higher than the first, the second and the third layers; the first layer has a highest silicon proportion among the first, the second and the third layers; the second layer has a highest oxygen proportion among the first, the second and the third layers; and the first layer has a highest nitrogen proportion among the first, the second and the third layers. An associated gate stack and a manufacturing method are also disclosed.